| 摘要 |
PROBLEM TO BE SOLVED: To provide a gas sensor having high moisture resistance to gas such as a TVOC gas comprising a plurality of gases and containing gas with relatively large molecular weight. SOLUTION: The gas sensor includes a pair of electrodes disposed on the surface of a substrate at a predetermined distance and a sensitive layer formed between the electrodes, the sensitive layer comprising a tin oxide layer loaded with platinum, palladium, and gold. COPYRIGHT: (C)2010,JPO&INPIT
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