| 摘要 |
PROBLEM TO BE SOLVED: To suppress unevenness in cooling a treatment object in cooling the heat treatment object placed in a treatment chamber. SOLUTION: This vacuum heat treatment furnace 10 includes the treatment chamber 13, a supporting part and a rotating part 16. In the treatment chamber 13, the heat treatment object 11 is heated, and the heated treatment object 11 is cooled in a cooling gas 12. The supporting part is disposed in the treatment chamber 13 to support the heat treatment object 11 in a state that the longitudinal direction of the heat treatment object 11 is directed from the inlet of the cooling gas 12 to the treatment chamber 13 toward an outlet, and is composed of a supporting member 19, an annular member 20, and a mounting jig 21. The rotating part 16 abuts on the heat treatment object 11, and rotates the heat treatment object 11 through its rotation. COPYRIGHT: (C)2010,JPO&INPIT |
