发明名称 SYSTEM AND METHOD FOR SEPARATING DEFECTIVE DIES FROM WAFER
摘要 A system separating defective dies from a wafer comprises a film frame platform and a pick-and-place device. The film frame platform comprises a support table assembly configured for supporting a film frame assembly and a platform surface configured to receive the placement of bins thereupon. The pick-and-place device is configured for moving in a linear manner between the support table assembly and the platform surface.
申请公布号 US2010166535(A1) 申请公布日期 2010.07.01
申请号 US20090648234 申请日期 2009.12.28
申请人 CHENG MEI INSTRUMENT TECHNOLOGY CO., LTD. 发明人 CHEN TE CHUN;HUANG CHIEN CHAO;TSAI CHENG TAO
分类号 H01L21/677 主分类号 H01L21/677
代理机构 代理人
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