发明名称 |
SYSTEM AND METHOD FOR SEPARATING DEFECTIVE DIES FROM WAFER |
摘要 |
A system separating defective dies from a wafer comprises a film frame platform and a pick-and-place device. The film frame platform comprises a support table assembly configured for supporting a film frame assembly and a platform surface configured to receive the placement of bins thereupon. The pick-and-place device is configured for moving in a linear manner between the support table assembly and the platform surface.
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申请公布号 |
US2010166535(A1) |
申请公布日期 |
2010.07.01 |
申请号 |
US20090648234 |
申请日期 |
2009.12.28 |
申请人 |
CHENG MEI INSTRUMENT TECHNOLOGY CO., LTD. |
发明人 |
CHEN TE CHUN;HUANG CHIEN CHAO;TSAI CHENG TAO |
分类号 |
H01L21/677 |
主分类号 |
H01L21/677 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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