发明名称 SEMICONDUCTOR DEVICE AND METHOD FOR TESTING THE SAME
摘要 <p>A semiconductor device (1) is comprised of a semiconductor wafer (11) on which a plurality of semiconductor chip forming areas (1A) are formed; circuit portions (12) which are provided within the semiconductor chip forming areas (1A) of the semiconductor wafer (11), respectively; control circuit portions (14) which are provided within the semiconductor chip forming areas (1A), respectively, and connected to the circuit portions (12), respectively, to control the electric power supplied to the circuit portions (12); a power supply line (18) connected to the control circuit portions (14); and a reference power line (17) connected to the control circuit portions (14).  In each control circuit portion (14), the voltage of electric power supplied from the power supply line (18) is controlled based on a reference voltage from the reference power line (17).</p>
申请公布号 WO2010073624(A1) 申请公布日期 2010.07.01
申请号 WO2009JP07125 申请日期 2009.12.22
申请人 NEC CORPORATION;KAMEDA, YOSHIO;NAKAGAWA, YOSHIHIRO;NOGUCHI, KOICHIRO;MIZUNO, MASAYUKI;NOSE, KOICHI 发明人 KAMEDA, YOSHIO;NAKAGAWA, YOSHIHIRO;NOGUCHI, KOICHIRO;MIZUNO, MASAYUKI;NOSE, KOICHI
分类号 H01L21/822;G01R31/28;H01L21/66;H01L27/04 主分类号 H01L21/822
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