发明名称 PHOTORESIST COMPOSITION AND METHOD OF FABRICATING THIN FILM TRANSISTOR SUBSTRATE
摘要 The present invention relates to a photoresist composition for digital exposure and a method of fabricating a thin film transistor substrate. The photoresist composition for digital exposure includes a binder resin including a novolak resin and a compound represented by the chemical formula (1), a photosensitizer including a diazide-based compound, and a solvent: wherein R1-R9 each include a hydrogen atom, an alkyl group, or a benzyl group, a is an integer from 0 to 10, b is an integer from 0 to 100, and c is an integer from 0 to 10.
申请公布号 US2010167476(A1) 申请公布日期 2010.07.01
申请号 US20090620988 申请日期 2009.11.18
申请人 SAMSUNG ELECTRONICS CO., LTD. 发明人 YUN SANG-HYUN;JEON WOOK-SEOK;PARK JUNG-IN;LEE HI-KUK;KIM BYUNG-UK;KIM DONG-MIN;KIM SEUNG-KI;BYEON JA-HUN
分类号 H01L21/336;G03F7/004 主分类号 H01L21/336
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