| 摘要 |
A vibration plate, an insulating layer and a plurality of piezoelectric layers, connected to each other, are connected to an upper face of a flow passage unit. Between the plurality of piezoelectric layers, there is provided an intermediate electrode having; opposing portions opposed to center portions of pressure chambers; and connecting portions for connecting the opposing portions at a region opposed to connection portion with the flow passage unit. Between the insulating layer and one of the piezoelectric layers, there is provided a lower electrode extending across the entire region not opposed to the intermediate electrode, including regions opposed to regions of the pressure chambers located outside the center portions thereof. At an upper face of the other piezoelectric layer, upper electrodes are located to be opposed to the pressure chambers. A shielding electrode is arranged between the vibration plate and the insulating layer across the entire regions thereof. |
