发明名称 |
ELECTRON-EMITTING ELEMENT, AND MANUFACTURING METHOD FOR IMAGE DISPLAY APPARATUS USING THE SAME |
摘要 |
<p><P>PROBLEM TO BE SOLVED: To provide a manufacturing method for an electron-emitting element which has high electron-emitting efficiency and is highly reliable. <P>SOLUTION: The manufacturing method for an electron-emitting element includes: a first process of preparing a first conductive film on at least a side face of an insulating layer having an upper face and the side face connected with the upper face; a second process of preparing a second conductive film from above the upper face over to above the side face of the first conductive film on the first conductive film; and a third process of etching the second conductive film. <P>COPYRIGHT: (C)2010,JPO&INPIT</p> |
申请公布号 |
JP2010146916(A) |
申请公布日期 |
2010.07.01 |
申请号 |
JP20080324466 |
申请日期 |
2008.12.19 |
申请人 |
CANON INC |
发明人 |
NOZU KYOTA;IWATA KENICHI;KOBAYASHI TAMAKI;KITAMURA SHIN;SHIMAZU AKIRA |
分类号 |
H01J9/02 |
主分类号 |
H01J9/02 |
代理机构 |
|
代理人 |
|
主权项 |
|
地址 |
|