| 摘要 |
PURPOSE: A standard mechanical interface with a wafer mapping system is provided to prevent the scrap of a normal wafer by monitoring not only the amount of the wafer though a wafer mapping but also the state of the wafer. CONSTITUTION: An elevator module(110) is connected to an SMIF(Standard Mechanical Interface) arm(30). A first sensor(120) is installed in one side of the elevator module. A second sensor is installed in the other side of the elevator module. A controller is connected to the first and the second sensor to switch the power of the SMIF(Standard Mechanical Interface). The first sensor and the second sensor use a proximity sensor.
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