| 摘要 |
<p>PURPOSE: An apparatus of EUV light source module is provided to maintain EUV light of uniform intensity by synchronizing a source supply and laser oscillation. CONSTITUTION: A collector(230) collects and reflects extreme ultraviolet light. A source supply unit(220) periodically injects a source droplet inside the collector to generate extreme ultraviolet light. A laser oscillator(210) oscillates laser to be projected on the source droplet. A synchronization controller(340) synchronizes with the oscillation of a laser beam. A light-emitting unit projects a sensing light(311) sensing the injection movement of the source droplet.</p> |
