VISION SYSTEM FOR SUBSTRATE ALIGNMENT APPARATUS AND METHOD FOR FOCUSING THE SAME

摘要

PURPOSE: A vision system for a substrate aligning device and a focus controlling method thereof are provided to shorten a focus control time by automatically controlling the focus of a vision system. CONSTITUTION: The image for controlling a focus is photographed through a camera unit of a vision system(S110). A storage image corresponding to the photographed image is set to a comparison image(S120). A separation distance between a set comparison image and a master image is calculated(S130). The camera unit moves corresponding to the separation distance(S140). The automatic focus control of the vision system is completed.