LIQUID DISCHARGE HEAD AND METHOD OF MANUFACTURING A SUBSTRATE FOR THE LIQUID DISCHARGE HEAD

摘要

PURPOSE: A liquid discharge head and a method for manufacturing a substrate for a liquid discharge head are provided to form feed holes with high density and thereby improve the strength of a liquid discharge head. CONSTITUTION: A method for manufacturing a substrate for a liquid discharge head comprises a step of arranging a plurality of concave parts on the rear side of a Si substrate in <100> direction. An etching solution is selected so that the etching speed of the Si substrate on {100} plane is lower than that on {110} plane. A crystal-axis anisotropic etching of the Si substrate is carried out through the concave parts, thereby forming a plurality of liquid feed holes.