SUBSTRATE FIRING FURNACE OF THE CIRCLE METHOD

摘要

PURPOSE: A circulation type substrate furnace is provided to obtain a stable sintering temperature by controlling the sintering temperature inside of a furnace body main body part using a main heater. CONSTITUTION: A furnace body main body part(10) accepts a substrate to the inside. A circulation route(20) supplies a hot air exhausted from the furnace body main body part to the furnace body main body part by circulating. A circulation fan(40) circulates the hot air. A main heater(52) heats the hot air with circulating the circulation route. A catalyst filter part(70) is installed on the circulation route. The catalyst filter part includes a main filter(54) capable of supporting the catalyst.