发明名称 METHOD AND DEVICE FOR CLEANING ELECTRONIC COMPONENTS PROCESSED WITH A LASER BEAM
摘要 The present invention relates to a method for processing with a laser beam and cleaning electronic components, wherein at least one new boundary surface is formed on an electronic component with the laser beam. The invention also relates to a device for processing and cleaning electronic components, comprising at least: a laser source for generating a laser beam, and at least one carrier for supporting an assembly of unseparated electronic components, wherein the carrier and the laser beam are displaceable relative to each other.
申请公布号 US2010159672(A1) 申请公布日期 2010.06.24
申请号 US20060993238 申请日期 2006.06.15
申请人 FICO B.V. 发明人 ZIJL JOANNES LEONARDUS JURRIAM;VAN EGMOND HENRI JOSEPH
分类号 H01L21/268;B23K26/00 主分类号 H01L21/268
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