| 摘要 |
The observation unit according to the present invention comprises an observation device observing a sample, a placing table on which the sample is placed, a drive device moving the placing table to an observation position where the sample is observed by the observation device, and a casing sealing a first space extending in a vertical direction. The first space and the placing table are arranged so as to be displaced from each other in a horizontal direction, and the drive device is arranged in the first space.
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