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摘要
申请公布号
JP4489576(B2)
申请公布日期
2010.06.23
申请号
JP20040367397
申请日期
2004.12.20
申请人
发明人
分类号
H01L27/04;H01L21/822;H01L21/8234;H01L27/06;H01L27/088;H01L29/78;H03F1/52
主分类号
H01L27/04
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