Method and device for separating a structure

摘要

#CMT# #/CMT# The method involves moving a rigid/flexible plane blade (101) i.e. unrolled roller, along advance direction (A) in a separation plane corresponding to a medium plane of a fragile zone e.g. porous zone, of a structure (102), from an inlet edge of the structure in direction of an outlet edge of the structure. The plane is moved by linear guiding rails, motors and variable length arms to cause progressive separation of two sub-structures of the structure. Inclination of the blade in the separation plane opposite to the advance direction is varied by the motors, the arms, oblong holes and rods. #CMT# : #/CMT# The sub-structures have thickness lower than 50 micrometers. An independent claim is also included for a device for separating a structure. #CMT#USE : #/CMT# Method for separating a structure i.e. cylindrical shaped silicon structure, into two parallel parts i.e. sub-structures, for a micro-electronic field, an optical field or an optoelectronic field, where the structure is composed of two adhered plates. #CMT#ADVANTAGE : #/CMT# The inclination of the blade in the separation plane opposite to the advance direction, is varied, thus varying the distribution of efforts exerted by the blade on the structure, to effectively control the separation process even using a thin blade, and hence reducing the deterioration risk of surfaces stripped by the separation of the structure, and reducing the risks of breakage of the sub-structures. The method effectively separates the structure with high quality even when one of the sub-structures has less thickness. The blade is not applied by push during its progression between the two sub-structures. #CMT#DESCRIPTION OF DRAWINGS : #/CMT# The drawing shows a schematic top view of a structure after the displacement of a rigid/flexible plane blade. A : Advance direction 101 : Rigid/flexible plane blade 102 : Structure 105 : Disbonding face 110, 111 : Lateral ends 112 : Rectilinear leading edge #CMT#POLYMERS : #/CMT# The blade is made of Kapton(RTM: polyimide film), paper or carbon fiber, or is covered of Teflon(RTM: PTFE) film.