发明名称 TAPE FOR WAFER PROCESSING AND METHOD FOR FABRICATING OF SEMICONDUCTOR PACKAGE USING THE SAME
摘要 PURPOSE: A tape for processing a wafer and a method for fabricating a semiconductor package using the same are provided to offset a compressive stress applied to the wafer by attaching a warpage preventive film including a tensile force to the upper side of the wafer. CONSTITUTION: A tape(102) for processing a wafer includes a film body(101) and a film for preventing warpage(104). The film for preventing warpage is attached on the single side of the film body and made of an expansible foaming film. The film for preventing warpage has a tensile force. The film for preventing warpage is made of an ultra violet reactant film.
申请公布号 KR20100066938(A) 申请公布日期 2010.06.18
申请号 KR20080125461 申请日期 2008.12.10
申请人 HYNIX SEMICONDUCTOR INC. 发明人 JOH, CHEOL HO
分类号 H01L21/60 主分类号 H01L21/60
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