发明名称 WORKPIECE TRANSFER SYSTEM
摘要 A workpiece transfer system may include a plurality of cassettes for storing workpieces, at least one workpiece processing apparatus, and a multi-joint industrial robot for loading and unloading workpieces to/from the cassettes. The multi-joint industrial robot may include a hand part for holding a workpiece, an arm part supporting the hand part so as to make the hand part rotatable, and a link mechanism that supports an arm joint part, positioned at a base side of the arm part, so as to make the arm joint part rotatable.
申请公布号 US2010150688(A1) 申请公布日期 2010.06.17
申请号 US20070302954 申请日期 2007.11.26
申请人 NIDEC SANKYO CORPORATION 发明人 KITAHARA YASUYUKI;KAINO SHIGEYUKI
分类号 H01L21/677 主分类号 H01L21/677
代理机构 代理人
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