发明名称 TILT STAGE, AND MICROSCOPE WITH THE SAME
摘要 <P>PROBLEM TO BE SOLVED: To provide a tilt stage having higher performance, and a microscope with the same. Ž<P>SOLUTION: The tilt stage has a tilt section 19 that has a stage plate 21 where a sample is mounted and a cup 23 which protrudes in an arc shape to a reverse face of the stage plate, and a fixing section 17 that has a receiving seat 25 which abuts on the cup 23, and, by rotating the cup 23 with respect to the receiving seat 25 while sliding the cup, an upper face of the stage plate 21 of the tilt section 19 is tilted from a horizontal state, a tilt angle is maintained by friction between the receiving seat 25 and the cup 23, a rotation center O is on the upper face of the stage plate 21 or above the stage plate in the horizontal state, and a gravity center G of the tilt section 19 is near the rotation center O for maintaining the tilt angle. Ž<P>COPYRIGHT: (C)2010,JPO&INPIT Ž
申请公布号 JP2010134192(A) 申请公布日期 2010.06.17
申请号 JP20080310069 申请日期 2008.12.04
申请人 NIKON CORP 发明人 HOSOBUCHI SEITO
分类号 G02B21/26;G02B7/00 主分类号 G02B21/26
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