| 摘要 |
PROBLEM TO BE SOLVED: To provide an EBAC (Electron Beam Absorbed Current) analyzing method which prevents an EBAC reaction from a front-stage net located at the front stage to an analysis subject net with a high analysis hit rate, and to provide an apparatus applicable to the analyzing method. SOLUTION: A first probe needle 1 connected to an output preamplifier 3 is brought into contact with an analysis subject net 1000 to be analyzed. A second probe needle 2 at a front-stage net 1100 or a power cable 1010 of the front-stage net 1100 is brought into contact. After the probe needles are brought into contact, an electronic beam is emitted onto the analysis subject net 1000. Charges accumulated in the analysis subject net 1000 are output outside via the preamplifier 3, while charges accumulated in the front-stage net 1100 are output via the second probe needle 2 to be eliminated from the front-stage net. This prevents erroneous display by the front-stage net 1100 upon EBAC analysis. COPYRIGHT: (C)2010,JPO&INPIT |
