| 摘要 |
PROBLEM TO BE SOLVED: To perfectly laminate two plates without voids among them, across the plates as a whole. SOLUTION: An upper-side plate is placed on an opening 4 of a chamber 3 of an upper stage 2 from the underside, for holding a pressurizing balloon 6 which pressurizes the central portion of the upper-side plate, to be deflected in a gentle arc. In this state, receiving plate 30 and a chamber 29 of a lower stage 28 are raised slowly at a predetermined speed, and a lower-side flat plate which is held by the receiving plate 30, with an adhesive applied on its upper surface, is gradually made to press against the upper-side plate, in aligning with the center portion. COPYRIGHT: (C)2010,JPO&INPIT
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