| 发明名称 |
ANTIREFLECTIVE COATING COMPOSITIONS |
| 摘要 |
The present invention relates to an organic spin coatable antireflective coating composition comprising a polymer, a linking component, a crosslinker, and an acid generator. The invention further relates to a process for imaging the present composition.
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| 申请公布号 |
US2010151392(A1) |
申请公布日期 |
2010.06.17 |
| 申请号 |
US20080332501 |
申请日期 |
2008.12.11 |
| 申请人 |
RAHMAN M DALIL;YI YI;MCKENZIE DOUGLAS;ANYADIEGWU CLEMENT;LU PING-HUNG |
发明人 |
RAHMAN M. DALIL;YI YI;MCKENZIE DOUGLAS;ANYADIEGWU CLEMENT;LU PING-HUNG |
| 分类号 |
G03F7/20;C08L83/06 |
主分类号 |
G03F7/20 |
| 代理机构 |
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