发明名称 Piezoelectric thin-film resonator and filter
摘要 A piezoelectric thin-film resonator includes: a lower electrode that is formed on a substrate; a piezoelectric film that is formed on the substrate and the lower electrode; an upper electrode that is formed on the piezoelectric film, with a portion of the piezoelectric film being interposed between the lower electrode and the upper electrode facing each other; and an additional film that is formed on the substrate on at least a part of the outer periphery of the lower electrode at the portion at which the lower electrode and the upper electrode face each other, with the additional film being laid along the lower electrode.
申请公布号 US7737806(B2) 申请公布日期 2010.06.15
申请号 US20080122246 申请日期 2008.05.16
申请人 发明人 TANIGUCHI SHINJI;NISHIHARA TOKIHIRO;YOKOYAMA TSUYOSHI;IWAKI MASAFUMI;HARA MOTOAKI;ENDO GO;SAITOU YASUYUKI;UEDA MASANORI
分类号 H03H9/00;H01L41/04 主分类号 H03H9/00
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