| 摘要 |
<p><P>PROBLEM TO BE SOLVED: To measure the voltage of an object under measurement with high precision, while avoiding an increase in apparatus costs. <P>SOLUTION: An intermediate electrode 4 is arranged between a facing electrode 2 arranged close to the object under measurement 11 and a reference electrode 3 set at a reference voltage Vref, while a capacitance circuit 7 is connected to between the facing electrode 2 and the intermediate electrode 4. A processing section 8 measures the voltage V1 of the object under measurement on the basis of voltages Va1, Vb1 measured by a voltage measuring section 5 and a voltage measuring section 6 before changing the capacitance Cv of the capacitance circuit 7, voltages Va2, Vb2 measured by the voltage measuring section 5 and the voltage measuring section 6 after changing the capacitance Cv of the capacitance circuit 7, and equation (a): V1=(Va2×Vb1-Va1×Vb2)/(Vb1-Vb2). <P>COPYRIGHT: (C)2010,JPO&INPIT</p> |
