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<P>PROBLEM TO BE SOLVED: To provide a dry vacuum pump unit for sufficiently securing reliability of these thrust bearings, even if rotation of screw rotors is increased in a speed. Ž<P>SOLUTION: This dry vacuum pump unit includes a main pump 15 arranged on the outside air pressure side, and a booster pump 16 arranged on the vacuum side and connected in series to the main pump 15. The main pump 15 includes a pair of screw rotors 52a and 52b arranged in parallel, a casing 50 and a pair of magnet rotors 54 and 54 integrally rotating with the pair of screw rotors 52a and 52b. Rotary shafts 51a and 51b of the pair of screw rotors 52a and 52b are arranged in vertical installation, and an intake port 15a arranged in the casing 50 is positioned above an exhaust port 15b, and thrust radial bearings (thrust bearings) 53-1 and 53-1 of the rotary shafts 51a and 51b are also arranged on the upper part intake side of the rotary shafts 51a and 51b. Ž<P>COPYRIGHT: (C)2010,JPO&INPIT Ž
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