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发明名称
HOCHTEMPERATUR-SCHICHTSUPRALEITERAUFBAU UND VERFAHREN ZU SEINER HERSTELLUNG
摘要
申请公布号
DE502007003623(D1)
申请公布日期
2010.06.10
申请号
DE200750003623T
申请日期
2007.08.20
申请人
EVICO GMBH
发明人
ENGEL, SEBASTIAN
分类号
H01L39/12;H01L39/24
主分类号
H01L39/12
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代理人
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