| 摘要 |
<P>PROBLEM TO BE SOLVED: To manufacture a fine through-hole structure with highly accurate and fine through-holes by preventing mold members from being damaged, and reducing manufacturing cost without damaging productivity. Ž<P>SOLUTION: The method for manufacturing a fine through-hole structure includes the heating process for heating a holding member 10 for holding a workpiece 11 and a mold 12 which is arranged opposite to the workpiece 11 and is formed with a transfer pattern 13 for boring fine through-holes in the workpiece 11 wherein at least one of the holding member 10 and the mold 12 is heated to a predetermined heating temperature, the pressing process for pressing the mold 12 into the workpiece 11, the expanding process for expanding the holding member 10 by heating the holding member 10 to an expansion-heating temperature which is a temperature higher than the heating temperature at the time of heating in the heating process, the cooling process for cooling the holding member 10 and the mold 12, and the releasing process for releasing the mold 12 from the workpiece 11. Ž<P>COPYRIGHT: (C)2010,JPO&INPIT Ž
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