发明名称 Methods and Apparatus For Thinning, Testing And Singulating A Semiconductor Wafer
摘要 A wafer translator is provided with a patterned layer of wafer bonding thermoset plastic and is removably attached with a wafer so as to form a wafer/wafer translator pair. The wafer translator acts as a mechanical support during a thinning process as well as during a wafer dicing operation. The singulated integrated circuits are then removed from the wafer translator. In some embodiments, wafer level testing of the integrated circuits on the wafer is performed subsequent to the wafer thinning process but before the wafer and wafer translator are separated. In other embodiments, wafer level testing of the integrated circuits on the wafer is performed subsequent to the wafer dicing operation but before the diced wafer and wafer translator are separated.
申请公布号 US2010144069(A1) 申请公布日期 2010.06.10
申请号 US20090617691 申请日期 2009.11.12
申请人 JOHNSON MORGAN T 发明人 JOHNSON MORGAN T.
分类号 H01L21/66;H01L21/762;H01L21/78 主分类号 H01L21/66
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