| 摘要 |
PURPOSE: A treating liquid supplying method is provided to supply the treating liquid constantly by adjusting the conversion timing of a supplying valve which supplies the treating liquid. CONSTITUTION: A treating liquid supply part(10) generates, supplies, and retrieves the treating liquid. The treating liquid supply part comprises a first tank(110), a second tank(120), a supply line(130), and a return line(140). The first tank and the second tank store the treating liquid. A substrate handling part(20) implements a predetermined processing. The substrate handling part comprises at least one or more processing chamber(21). The processing chamber comprises a housing(22), a spin chuck(24), a driving part(26), and a nozzle unit(28).
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