MANUFACTURING METHOD OF A LIGHT EMITTING DEVICE

摘要

PURPOSE: A method for manufacturing a light emitting device is provided to uniformly form a film thickness by controlling a transition speed of a deposition source holder according to the measured value by a film thickness monitor. CONSTITUTION: A substrate with an electrode is transferred to a process chamber connected to a first transfer chamber(102). The substrate is annealed in a vacuum state to remove moisture and gas inside the process chamber. The annealed substrate is transferred to a first film formation chamber(106R) connected a second transfer chamber through a first delivery chamber. An organic compound layer is formed on the electrode inside the first film formation chamber. The substrate with the organic compound layer is transferred to a second film formation chamber(106B) through a second delivery chamber. A metal layer is formed on the organic compound layer inside the second film formation chamber.