ACCELERATION SENSOR

摘要

An acceleration sensor is provided with: a rectangular movable electrode (4, 5); a pair of beams (6a, 6b, 7a, 7b), which are connected to the center of facing two sides of the movable electrode (4, 5) and swingably support the movable electrode (4, 5); and first and second fixed electrodes (20a, 20b, 21a, 21b) which are respectively provided on one side and the other side of a boundary line by having the straight line connecting the pair of beams (6a, 6b, 7a, 7b) as the boundary line, and are arranged to face the front surface of the movable electrode (4, 5) with a predetermined interval therebetween.  On the rear surface of the movable electrode (4, 5), first and second recessed sections (11a, 11b, 11c, 11d, 13a, 13b, 13c, 13d, 12, 14) are formed on said side and the other side of the boundary line, respectively.