| 摘要 |
PROBLEM TO BE SOLVED: To provide a method of manufacturing an organic TFT array, which has high resolution and a high numeral aperture and also can stably obtain excellent performance, and to provide the organic TFT array. SOLUTION: The method of manufacturing the organic thin-film transistor array which has a thin-film layer covering an organic semiconductor film, and a source and a drain electrode and a pixel electrode formed across at least the thin-film layer and in which the drain electrode and the pixel electrode are connected through an opening formed in the thin-film layer includes steps of: forming a first resist layer in a predetermined region of the drain electrode; forming a second resist layer at least on the first resist layer; forming the organic semiconductor film on the source and drain electrodes after forming the second resist layer; depositing the thin-film layer over the entire surface of a substrate where the organic semiconductor film is formed; and forming the opening in the thin-film layer by lifting off the first resist layer; and forming the pixel electrode to be connected to the drain electrode through the opening. COPYRIGHT: (C)2010,JPO&INPIT
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