发明名称
摘要 <p><P>PROBLEM TO BE SOLVED: To provide a method for stripping a layer not only of small area but also of large area with a high yield over the entire surface of the layer being stripped without causing any damage thereon, and to provide a lightweight semiconductor device produced by pasting the layer being stripped to various base materials and its producing method, especially a lightweight semiconductor device produced by pasting various elements represented by TFT to a flexible film and its producing method. <P>SOLUTION: A first material layer 11 is provided on a substrate, and a second material layer 12 is provided in contact with the first material layer 11. Even if deposition of a film, heat treatment at 500°C or above, or irradiation with laser light is carried out, the first material layer 11 can be separated clearly and readily by a physical means in the second material layer 12 or on the interface, so long as the first material layer 11 has a tensile stress before being stripped and the second material layer 12 has a compressive stress. <P>COPYRIGHT: (C)2003,JPO</p>
申请公布号 JP4472238(B2) 申请公布日期 2010.06.02
申请号 JP20020233745 申请日期 2002.08.09
申请人 发明人
分类号 G02F1/1333;H01L21/02;G02F1/1368;G09F9/00;G09F9/30;G09F9/35;H01L21/20;H01L21/268;H01L21/336;H01L27/12;H01L29/786;H01L51/50;H05B33/10;H05B33/14 主分类号 G02F1/1333
代理机构 代理人
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