| 摘要 |
PROBLEM TO BE SOLVED: To provide a polarizer having a higher level of polarization performance for a light in the deep ultraviolet wavelength. SOLUTION: The polarizer includes: a substrate 1 transparent to deep ultraviolet light; and a periodic structure 2 including a plurality of structural elements at predetermined intervals on the substrate 1, the polarizer being configured such that the deep ultraviolet light incident thereon is split into reflected light reflected by the periodic structure 2 and transmitted light passing between the structural elements adjacent to each other, and the periodic structure being composed of tungsten or chromium oxide. COPYRIGHT: (C)2010,JPO&INPIT
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