发明名称 CONVEYING MECHANISM
摘要 PROBLEM TO BE SOLVED: To provide a conveying mechanism capable of stably conveying a plurality of devices even when they are small-sized devices or have unevenness on surfaces. SOLUTION: The conveying mechanism (15) includes a casing (48), a movable pad (62) stored in the casing (48), and a movable pad moving means (68). The plurality of devices (30) having been divided are stored in the storage recessed part (70) of a movable pad (62) of the casing (48) positioned in conveying-in/out position (64), and then moved to a holding position (66) together with the movable pad (62), and the devices (30) are held between the storage recessed part (70) and the lower surface wall (74) of the casing (48), and conveyed up to a storage tray (14). A conveying-in/out opening (82) of the casing (48) is positioned right above the opening portion (82) of the storage tray (14), and the movable pad (62) is moved to the conveying-in/out position (64). COPYRIGHT: (C)2010,JPO&INPIT
申请公布号 JP2010118376(A) 申请公布日期 2010.05.27
申请号 JP20080288459 申请日期 2008.11.11
申请人 DISCO ABRASIVE SYST LTD 发明人 ISHII SHIGERU
分类号 H01L21/301 主分类号 H01L21/301
代理机构 代理人
主权项
地址