LASER WASHING DEVICE THAT IS POSSIBLE TO INSPECTION PARTICLE

摘要

PURPOSE: A laser washing device capable of inspecting a particle is provided to improve work efficiency by inspecting a particle on the wafer without moving the wafer after cleaning the wafer. CONSTITUTION: In a laser washing device capable of inspecting a particle, a laser scan apparatus(1) is arranged inside a laser cleaning chamber(51). The laser scan apparatus inspects the particle on the wafer. A controller(3) is installed outside the cleaning chamber in order to control the laser scan apparatus.