| 摘要 |
PURPOSE: An apparatus for supplying a chemical liquid is provided to overcome the leakage of constant temperature water due to the damage of a pipe by including a heating wire and a temperature controller. CONSTITUTION: A supply unit(100) supplies a chemical liquid to a substrate. A heating wire(200) is located on the path of the supply unit. The chemical liquid which passes through the heating wire is heated. A temperature controller(300) controls the heating wire to maintain the constant temperature of the chemical liquid. The temperature controller including a temperature sensor and a controller(320). The controller controls the heating sensor to maintain the temperature of the chemical solution.
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