| 摘要 |
<P>PROBLEM TO BE SOLVED: To provide a radiation source that radiates more uniform extreme ultraviolet rays (EUV). <P>SOLUTION: A source configured to generate EUV radiation includes: a fuel droplet generator configured to deliver a droplet of fuel to an interaction point, optics configured to deliver fuel vaporizing and exciting radiation to the interaction point to generate a plasma; and a collector arranged to collect EUV radiation emitted by the plasma. The optics are arranged such that in use the fuel vaporizing and exciting radiation is incident upon more than one side of the fuel droplet at the interaction point. <P>COPYRIGHT: (C)2010,JPO&INPIT |
