| 摘要 |
PROBLEM TO BE SOLVED: To prevent abnormal deformation of a bellows cover which covers a linear shaft of a clean robot. SOLUTION: A chamber 30 is provided along an air intake path 28 for taking the open air into the bellows cover 19, and the chamber 30 is made to communicate with the inside of the cover 19 through a narrow inner communication path 31. By sucking the air in the chamber 30 through a suction path 32 formed in the linear shaft 5, the air in the bellows cover 19 flows through the communication path 31 into the chamber 30 when the cover contracts. Thus, a pressure in the bellows cover 19 is increased higher than conventional cases by an amount of pressure loss due to an air flow in the inner communication path 31 to prevent such a situation from occurring, that the pressure in the cover 19 excessively lowers when the cover stretches to cause the cover 19 to abnormally deform. COPYRIGHT: (C)2010,JPO&INPIT
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