发明名称 |
THIN-FILM MULTILAYER STRUCTURE, COMPONENT COMPRISING SAID STRUCTURE AND ITS METHOD OF DEPOSITION |
摘要 |
The invention relates to a corrosion-resistant thin-film multilayer structure having a low wear rate and a low coefficient of friction, comprising 1 to 1000 periods, one period comprising 2 to 100 layers (A, B) based on carbon, silicon and hydrogen, and optionally a functional surface layer (FSL). The invention also relates to a component comprising the thin-film multilayer structure and to its method of deposition. |
申请公布号 |
EP1979505(B1) |
申请公布日期 |
2010.05.19 |
申请号 |
EP20070703133 |
申请日期 |
2007.01.30 |
申请人 |
EUROPEAN AERONAUTIC DEFENCE AND SPACE COMPANY EADS FRANCE |
发明人 |
LUCAS, VALERIE;JOINET, MICKAEL;TEYSSANDIER, FRANCIS;THOMAS, LAURENT |
分类号 |
C23C28/04 |
主分类号 |
C23C28/04 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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