发明名称 |
Method and apparatus for laser control in a two chamber gas discharge laser |
摘要 |
A laser control system contains an oscillator gas chamber and an amplifier gas chamber. A first voltage input is operatively connected to deliver electrical pulses to a first pair of electrodes within the oscillator gas chamber and a second pair of electrodes within the amplifier gas chamber. An output of the gas chambers is an energy dose calculated by a trapezoidal window. A control circuit connects to the first voltage input for modifying the first voltage input. A feedback control loop communicates an output of the gas chambers to the control circuit for modifying the first voltage input.
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申请公布号 |
US7720120(B2) |
申请公布日期 |
2010.05.18 |
申请号 |
US20080255367 |
申请日期 |
2008.10.21 |
申请人 |
CYMER, INC. |
发明人 |
JACQUES ROBERT N. |
分类号 |
H01S3/00;H01S3/13;H01S3/22 |
主分类号 |
H01S3/00 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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