发明名称 ABATEMENT SYSTEM
摘要 Abatement systems are described. An abatement system includes a combustion chamber and a fuel burner ring coupled with the combustion chamber. Another abatement system includes a combustion chamber and a fuel flow control mechanism coupled with the combustion chamber.
申请公布号 WO2010054291(A2) 申请公布日期 2010.05.14
申请号 WO2009US63692 申请日期 2009.11.09
申请人 APPLIED MATERIALS, INC.;FOX, ALLEN, G. 发明人 FOX, ALLEN, G.
分类号 H01L21/00;H01L21/02 主分类号 H01L21/00
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