DEVICE AND METHOD FOR THE WET PROCESSING OF DIFFERENT SUBSTRATES

摘要

The invention relates to the wet processing and electroplating of one side and/or the edge of a flat product (1) used as a substrate in production systems containing process chambers (4), through which treatment liquid flows (8), wetting the product (1) that is positioned at the upper opening (3) of the process chamber (4). According to prior art, process chambers (4) of this type are suitable for one type of product (1) with particular dimensions. The invention provides the flexibility required in practice with respect to products (1) of different sizes. To achieve this, the process chamber (4) is designed in at least two parts with a lower part (5) and at least two upper parts (6) that can be preferably automatically interchanged. The separation point (7) of both parts is designed in a positive manner and can be automatically detached. Upper parts (6) that are adapted specifically to the product are placed on the fixed lower part (5) in order to produce the product, thus permitting the entire process chamber (4) to be optimised for the production of the designated type of product (1).