| 摘要 |
<p><P>PROBLEM TO BE SOLVED: To provide a test piece observation method capable of allocating an observation field of vision selectively to a portion required for observation of the test piece that is an observation object, and to provide an electron microscope. <P>SOLUTION: The test piece observation method includes a process to set a contour line or a plurality of points located on the contour line on an image of an electron microscope and a process to arrange a plurality of fields of vision of the electron microscope along the contour line, and a device to achieve the observation method is provided. By setting a required contour line on the observation object having a variety of shapes, and arranging the filed of vision, an image of the electron microscope can be selectively obtained based on the required field of vision set along the shape of the observation object. <P>COPYRIGHT: (C)2010,JPO&INPIT</p> |
