Method for making semiconductor device and semiconductor device made thereby

摘要

Disclosed is a method for yield enhancement of making a semiconductor device. The method for yield enhancement of making a semiconductor device comprises the steps of: providing the semiconductor device comprising an epitaxial layer including a defect; forming a dielectric layer on the epitaxial layer; detecting and identifying a location of the defect; and etching the dielectric layer and leaving a part of the dielectric layer to cover an area substantially corresponding to the detected defect. The semiconductor device made by the method is also disclosed.

主权项

1. A method for yield enhancement of making a semiconductor device, comprising the steps of:
providing the semiconductor device comprising an epitaxial layer including a defect; forming a dielectric layer on the epitaxial layer; detecting and identifying a location of the defect; etching the dielectric layer and leaving a part of the dielectric layer to cover an area substantially corresponding to the detected defect; forming a photo-resist on the dielectric layer in the area substantially corresponding to the detected defect before etching the dielectric layer; and forming an electrode comprising a first part and a second part, wherein the first part overlaps the area and the second part does not overlap the area, wherein detecting and identifying the location of the defect is performed by an image recognition system, and wherein the step of forming a photo-resist on the dielectric layer in an area substantially corresponding to the detected defect comprises coating the photo-resist on the dielectric layer and exposing a part of the photo-resist according to an information of the location of the defect provided by the image recognition system.