| 摘要 |
<p><P>PROBLEM TO BE SOLVED: To provide a material gas concentration controller capable of keeping the concentration of a material gas in a mixed gas constant even if the partial pressure of the material gas is varied, having high responsiveness and capable of controlling a concentration by being easily attached to a bubbling system. <P>SOLUTION: The material gas concentration controller is used for a material gasifying system 1 including a tank 13 for housing a material L, a lead-in pipe 11 for leading a carrier gas for gasifying the housed material into the tank, and a lead-out pipe 12 for leading the mixed gas of the material gas in which the material gas is gasified and the carrier gas from the tank 13. The controller includes a base B connected to the lead-out pipe 12 and having an internal flow path B1 for making the mixed gas flow, a concentration measurement section CS for measuring the concentration of the material gas in the mixed gas flowing through the internal flow path B1, and a first valve 23 provided in the downstream from the concentration measurement section CS in the internal flow path B1 and adjusting the measurement concentration measured by the concentration measurement section CS. The concentration measurement section CS and the first valve 23 are attached to the base B. <P>COPYRIGHT: (C)2010,JPO&INPIT</p> |
