| 摘要 |
PURPOSE: A spray device is provided to improve substrate dry efficiency by easily controlling a spray direction of the first spray unit according to the movement of a support unit fixed to one side of the first spray unit. CONSTITUTION: A first spray unit(120) is positioned on the region for initially spraying a dray gas to a substrate for a flat panel display. The first spray unit sprays the dry gas with an angel of 50 to 80 degrees based on the substrate transfer direction. A second spray unit(130) is positioned on the rear of the first spray unit. A second spray unit vertically sprays the dry gas based on the substrate transfer direction.
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