| 摘要 |
PURPOSE: A liquid treatment tank which has a minimized opening area of a workpiece path is provided to maintain the sealability of the workpiece path by rapidly closing the workpiece path. CONSTITUTION: A liquid treatment tank comprises a gate apparatus(85) of a workpiece path(88). The workpiece path comprises an opening(88b) and an expended opening(88a). The opening is slit type. The gate apparatus is composed of a gate member and a shutter plate. The gate member opens and closes the opening. The shutter plate opens and closes the expended opening.
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