| 摘要 |
PURPOSE: An inner tube pressure detecting method of a polishing head of a CMP(Chemical Mechanical Polishing) apparatus is provided to reduce unnecessary pause of a CMP apparatus by detecting the pressure of an inner tube in a real time and informing the abnormality. CONSTITUTION: A pressure of an inner tube is detected in a real time with an inner tube pressure sensor(S210). A detected inner tube pressure is determined whether it is within an allowable pressure range(S220). If the detected inner tube pressure is within allowable pressure range, a tube pressure is displayed to the outside with an indicator(S262). If the detected inner tube pressure is within allowable range, a CMP process is executed(S264). The detected inner tube pressure is not within the pressure range, an alarm signal is generated and the CMP process is stopped(S270).
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