| 摘要 |
PROBLEM TO BE SOLVED: To prevent the loosening of the engagement of a rotor and a rotating shaft caused by the deformation of the rotor by centrifugal forces acting a large number of rotating blades which are protrusively arranged at the external periphery of the rotor, in the rotor of a turbo-molecular pump which has the rotating shaft at its center and rotates at high speed. SOLUTION: The rotor 1 of the molecular pump has rotor blade stages comprising the plurality of rotor blades 1 and installed in a radially protruding manner and in multiple stages at the external periphery of a cylindrical hollow hub 1a. The rotor 1 is formed in a cup shape with a boss 1c provided at an end of the hub part 1a and axially protruding. An end of the rotating shaft 2 is fitted in a shaft hole 1d formed at the boss 1c, and the rotor is fastened to the rotating shaft 2 with a nut 3 screwed to a screw 2a at the end of the rotating shaft. COPYRIGHT: (C)2010,JPO&INPIT
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